CIMC ENRIC successfully delivered China's first phosphine-hydrogen mixed gas tube skids

Recently, Shijiazhuang Enric Gas Equipment Co., Ltd. (hereinafter referred to as "Shijiazhuang Enric"), a subsidiary of CIMC ENRIC, successfully delivered China's first phosphine-hydrogen mixed gas tube skids, marking we achieved new breakthroughs in the field of electronic gas storage and transportation equipment in China.

phosphine-hydrogen mixed gas tube skids

It is understood that the tube skids developed independently by CIMC ENRIC is a special equipment dedicated to batch storage and transportation for phosphine and hydrogen mixture. In the semiconductor manufacturing process, a certain concentration of phosphine and hydrogen mixed gas (a type of electronic gas) is common used. At present, this type of gas storage and transportation on the market mainly uses high-purity high-pressure gas cylinders (Y-ton gas cylinders), Small gas cylinders, and the tube skids delivered this time can store 13m³ gas, and the gas storage capacity of single transportation is equivalent to the gas storage capacity of 200 small gas cylinders, which greatly reduces the operating costs of gas companies and meets the large gas consumption demands in the semiconductor industry.

Moreover, because the mixture of phosphine and hydrogen is extremely flammable and highly toxic, the equipment is designed to achieve "zero leakage", and orbital welding is completely used between the pipeline and the valve, which greatly improves the safety of the product .

CIMC ENRIC, as the largest supplier of electronic gas storage and transportation equipment in China, has conducted in-depth research on phosphine and hydrogen gas mixture storage and transportation equipment for many years, and has mastered key core technologies. The launch of large-volume tube skids will further promote the development of the semiconductor industry and contribute to the realization of China's "chip power".